Nikon NEXIV VMZ-NWL200
- Model
- NEXIV VMZ-NWL200
- Category
- Video and optical measuring
- Solutions
- Industrial Metrology and Quality Inspection
VMZ-NWL200 is an automatic wafer measuring system that integrates a video measuring system NEXIV and a wafer loader NWL200. The NEXIV video measurement system, used extensively in the global semiconductor industry, has been integrated with Nikon’s proven NWL200 automatic wafer loading system.
Overview
VMZ-NWL200 is an automatic wafer measuring system that integrates a video measuring system NEXIV and a wafer loader NWL200. The NEXIV video measurement system, used extensively in the global semiconductor industry, has been integrated with Nikon’s proven NWL200 automatic wafer loading system.
Applications: Large-volume dimensional inspection · Machine tool and robot calibration · Reverse engineering · Internal defect inspection with CT · Small-part optical measurement
Technical specifications
| Device | Video Measuring System：NEXIV（VMZ-S3020 Type2, Type3, TypeTZ) |
|---|---|
| Wafer *1 | size：6.8 inch（SEMI/JEIDA Standard) |
| Compatible carrier | 6 inch：PA182-60MB-06XX（Entegris） |
| Throughput *2 | 6 min 45 sec |
| Minimum L/S | 500 line/mm |
| Operating environment temperature | 19～26℃ |
| Operating environment humidity | Less than 70% RH |
| Dimensions | 4125 x 3040 mm |
| Power source voltage | AC100-120V/200-240V |
| Power source frequency | 50Hz/60Hz |
| Current consumption | 7.5A/3.7A |
| Vacuum | -80kPa |
Solutions
Industrial Metrology and Quality Inspection
Laser trackers, measuring arms, laser radar, X-ray CT and optical measuring for manufacturing quality.
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