Nikon NEXIV VMZ-H3030
- Model
- NEXIV VMZ-H3030
- Category
- Video and optical measuring
- Solutions
- Industrial Metrology and Quality Inspection
Offering advanced usability and performance, the NEXIX VMZ-H3030 achieves the highest accuracy within Nikon's NEXIV series. VMZ-H3030 provides a 300x300x150 mm (X,Y,Z) measuring envelope together with a range of high quality optics, complete with a TTL (through-the-lens) scanning laser as standard. The system is designed to provide the ultimate in high accuracy measurement.
Overview
Offering advanced usability and performance, the NEXIX VMZ-H3030 achieves the highest accuracy within Nikon's NEXIV series. VMZ-H3030 provides a 300x300x150 mm (X,Y,Z) measuring envelope together with a range of high quality optics, complete with a TTL (through-the-lens) scanning laser as standard. The system is designed to provide the ultimate in high accuracy measurement.
Applications: Large-volume dimensional inspection · Machine tool and robot calibration · Reverse engineering · Internal defect inspection with CT · Small-part optical measurement
Technical specifications
| XYZ Strokes | 300x300x150 mm |
|---|---|
| Minimum Readout | 0.01 μm |
| Maximum Sample Weight | 30 kg (Accuracy Guaranteed: 10 kg) |
| Maximum Permissible Error (for samples under 20 kg) | E UX,MPE E UY,MPE : 0.6+2L /1000 μm E UXY,MPE : 0.9+3L /1000 μm E UZ,MPE : 0.9+L /150 μm |
| Accuracy Guaranteed Temperature | 20 °C ± 0.5 K |
| Maximum Driving Speed XY, Z | 100 mm/s, 50 mm/s |
| Minimum Driving Speed XY, Z | 0.01 mm/s, 0.001 mm/s |
| Camera | VGA 1/3" B/W, Color *Color camera option is available only with Type 1, 2 and 3. |
| Working Distance | Type 1, 2, 3: 50 mm (10 mm when using 75 degree LED illumination) / Type 4: 30 mm Type TZ: 31 mm (low magnification), 11 mm (high magnification) |
| Autofocus | Vision AF, Laser AF |
| Power Source | AC 100 - 240 V ± 10% 50/60 Hz |
| Power Consumption | 5A - 2.5 A |
| Dimensions (WxDxH) and Weight | Main body with table: 1000 x 1125 x 1750 mm / approx. 500 kg Controller: 190 x 450 x 440 mm / approx. 15 kg" |
| Footprint (WxD) | 3000×2800 mm |
| Type 1, 2, 3, and 4 | Episcopic, diascopic, and 8-segment ring with 3 angles *All white LED/Type 4 has only 1 angle |
| Type TZ | Episcopic, diascopic, darkfield |
| Power Source | AC 100 - 240 V u00b1 10% 50/60 Hz |
| Power Consumption | 5 A - 2.5 A |
| Zooming Head | Optical Magnification / FOV / Applications |
| Type 1 | 0.5X - 7.5X / 9.33×7.01~0.622×0.467 mm / Molds, mechanical parts (household, automotive), PCB, electronic parts |
| Type 2 | 1X - 15X / 4.67×3.5~0.311×0.233 mm |
| Type 3 | 2X - 30X / 2.33×1.75~0.155×0.117 mm / Electronic parts |
| Type 4 | 4X - 60X / 1.165×0.875~0.078×0.058 mm / High density package substrate (line, width, height) |
| Type TZ | 1X - 120X / 4.67×3.5~0.039×0.029 mm / Wafer pattern (WLP, bump height, rewiring mask, MEMS mask) |
Solutions
Industrial Metrology and Quality Inspection
Laser trackers, measuring arms, laser radar, X-ray CT and optical measuring for manufacturing quality.
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