Nikon NEXIV VMF-K Series
- Model
- NEXIV VMF-K Series
- Category
- Video and optical measuring
- Solutions
- Industrial Metrology and Quality Inspection
Nikon’s NEXIV VMF-K Series transforms optical measurement, combining high-speed 2D and 3D capabilities with exceptional accuracy. Nikon’s NEXIV VMF-K Series transforms optical measurement, combining high-speed 2D and 3D capabilities with exceptional accuracy. Its advanced confocal system boosts throughput for diverse samples, supporting miniaturization in semiconductor and precision engineering industries.
Overview
Nikon’s NEXIV VMF-K Series transforms optical measurement, combining high-speed 2D and 3D capabilities with exceptional accuracy. Nikon’s NEXIV VMF-K Series transforms optical measurement, combining high-speed 2D and 3D capabilities with exceptional accuracy. Its advanced confocal system boosts throughput for diverse samples, supporting miniaturization in semiconductor and precision engineering industries.
Applications: Large-volume dimensional inspection · Machine tool and robot calibration · Reverse engineering · Internal defect inspection with CT · Small-part optical measurement
Technical specifications
| Measuring head | Standard head (Type-S) / High-magnification head (Type-H) / 45× High-magnification head |
|---|---|
| Optical magnification | Magnification / 1.5× / 3.0× / 7.5× / 15× / 30× / 45× |
| Working distance | 24 mm / 24 mm / 5 mm / 20 mm / 5 mm / 5 mm |
| Confocal optics (height measurement) | Maximum scan height / 1 mm |
| Field of view | 7.80×5.82 mm / 3.90×2.91 mm / 1.56×1.17 mm / 0.78×0.58 mm / 0.39×0.29 mm / 0.26×0.19 mm |
| Height measurement repeatability (2σ) | 0.6 μm / 0.35 μm / 0.25 μm / 0.25 μm / 0.2 μm / 0.2 μm |
| Height resolution | 0.025 μm / 0.01 μm |
| Light source | Green LED |
| Bright Field Optics (two-dimensional measurement) | Magnification method / Motorised 5-step zoom |
| Field of view | 7.81×5.86~ 0.52×0.39 mm / 3.91×2.93~ 0.26×0.20 mm / 1.56×1.17~ 0.10×0.078 mm / 1.27×0.95~ 0.099×0.074 mm / 0.63×0.47~ 0.049×0.037 mm / 0.63×0.47~ 0.049×0.037 mm |
| Illumination | Diascopic, coaxial episcopic and ring / Diascopic, coaxial episcopic |
| Light source | White LED |
| Autofocus | TTL Laser AF, Image AF |
| Main body | Power source / AC 100V-240V ±10%, 50/60 Hz |
| Power consumption | 5.5A-3A |
| Safety standard | SEMI S2/S8 compliance *1 |
| Model | VMF-K3040 / VMF-K6555 / VMF-K6561 |
| Main Body | XYZ strokes / 300×400×150 mm / 650×550×150 mm / 650×610×150 mm |
| Accuracy guaranteed loading capacity | 20 kg / 30 kg / 30 kg |
| Maximum permissible error (L: Length in mm) | E UX,MPE E UY,MPE 1.2 + 4L/1000 μm |
| Minimum readout | 0.01 μm |
| Dimensions (WxDxH) and weight | Main body and table / 1146×1247×1973 mm / approx. 800 kg / 1198×1640×1973 mm / approx. 800 kg / 1198×1770×1973 mm / approx. 820 kg |
| Controller | 190×450×440 mm / approx. 14 kg |
| Recommended installation dimensions (WxD) *2 | 3150×3000 mm / 3200×3300 mm / 3200×3430 mm |
| Minimum installation dimensions (WxD) | 2500×1600 mm / 2500×1900 mm / 2500×2030 mm |
| Measuring head | Standard head (Type-S) / High-magnification head (Type-H) / 45× High-magnification head |
| Optical magnification | Magnification / 1.5× / 3.0× / 7.5× / 15× / 30× / 45× |
| Working distance | 24 mm / 24 mm / 5 mm / 20 mm / 5 mm / 5 mm |
| Confocal optics (height measurement) | Maximum scan height / 1 mm |
| Field of view | 7.80×5.82 mm / 3.90×2.91 mm / 1.56×1.17 mm / 0.78×0.58 mm / 0.39×0.29 mm / 0.26×0.19 mm |
| Height measurement repeatability (2σ) | 0.6 μm / 0.35 μm / 0.25 μm / 0.25 μm / 0.2 μm / 0.2 μm |
| Height resolution | 0.025 μm / 0.01 μm |
| Light source | Green LED |
| Bright Field Optics (two-dimensional measurement) | Magnification method / Motorised 5-step zoom |
| Field of view | 7.81×5.86~ 0.52×0.39 mm / 3.91×2.93~ 0.26×0.20 mm / 1.56×1.17~ 0.10×0.078 mm / 1.27×0.95~ 0.099×0.074 mm / 0.63×0.47~ 0.049×0.037 mm / 0.63×0.47~ 0.049×0.037 mm |
| Illumination | Diascopic, coaxial episcopic and ring / Diascopic, coaxial episcopic |
| Light source | White LED |
| Autofocus | TTL Laser AF, Image AF |
| Main body | Power source / AC 100V-240V ±10%, 50/60 Hz |
| Power consumption | 5.5A-3A |
Solutions
Industrial Metrology and Quality Inspection
Laser trackers, measuring arms, laser radar, X-ray CT and optical measuring for manufacturing quality.
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